Master’s Thesis J. Johnson, 2009 J. Johnson, “Modeling of Advanced Planarization Processes: Electrochemical-Mechanical Planarization (eCMP), STI CMP using Non-Conventional Slurries,” M.S. thesis, Dept. of Electrical Engineering & Computer Science, Massachusetts Institue of Technology, Cambridge, MA, June 2009. ICPT D. Boning, W. Fan, J. Johnson 2010 Abstract D. Boning, W. Fan, and J. Johnson, “Wafer-Level Modeling of Electrochemical-Mechanical Planarization (ECMP),” conference proceedings paper [Submitted], Fall Meeting, Nov. 2010.† MRS D. Boning, J. Johnson 2010 Abstract D. Boning and J. Johnson, “Slurry Particle Agglomeration Model for Chemical Mechanical Planarization (CMP),” oral presentation & conference proceedings paper, CMP Symposium, MRS Spring Meeting, April 2010.† MRS D. Boning, J. Johnson 2009 Abstract D. Boning and J. Johnson, “The Evolution of Pattern-Density in CMP Modeling,” oral presentation, CMP Symposium, MRS Spring Meeting, April 2009.† MARC D. Boning, J. Johnson, W. Fan 2010 Abstract D. Boning, J. Johnson, and W. Fan “Advanced Planarization Modeling,” to be presented (oral & poster), MTL Annual Research Meeting, January 2010.† MARC D. Boning, J. Johnson, W. Fan 2009 Abstract D. Boning, J. Johnson, and W. Fan “Advanced Planarization Modeling,” presented (oral & poster), MTL Annual Research Meeting, January 2009.† ERC D. Boning, J. Johnson, W. Fan 2010 Annual Report Boning, J. Johnson, and W. Fan “Advanced Planarization Modeling,” presented (oral & poster), ERC Annual Review Meeting, March 2010.† ERC D. Boning, J. Johnson, W. Fan 2009 Annual Report Boning, J. Johnson, and W. Fan “Advanced Planarization Modeling,” presented (oral & poster), ERC Annual Review Meeting, March 2009.† ICCAD D. Boning, et al. 2008 Workshop D. Boning, K. Balakrishnan, A. Chang, N. Drego, W. Fan, J. Johnson, and H. Taylor, “Measuring and Modeling IC Variability at the Process, Device, and Circuit Levels,” ICCAD Workshop on Test Structure Design for Variability Characterization (TSD), San Jose, CA, Nov.†2008. Papers_&_Presentations_files/Johnson-SM2009-Thesis.pdfPapers_&_Presentations_files/Johnson-SM2009-Thesis.pdfPapers_&_Presentations_files/Johnson-SM2009-Thesis.pdfPapers_&_Presentations_files/Johnson-SM2009-Thesis.pdfPapers_&_Presentations_files/MRS%20Spring%202009%20D.Boning,%20J.Johnson.pptPapers_&_Presentations_files/MRS%20Spring%202009%20D.Boning,%20J.Johnson.pptPapers_&_Presentations_files/Advanced%20Planarization%20Modeling-MARC%202010%20Abstract.pdfPapers_&_Presentations_files/Advanced%20Planarization%20Modeling-MARC%202010%20Abstract.pdfPapers_&_Presentations_files/Advanced%20Planarization%20Technology-MARC%202009%20Abstract.pdfPapers_&_Presentations_files/Advanced%20Planarization%20Technology-MARC%202009%20Abstract.pdfshapeimage_1_link_0shapeimage_1_link_1shapeimage_1_link_2shapeimage_1_link_3shapeimage_1_link_4shapeimage_1_link_5shapeimage_1_link_6shapeimage_1_link_7shapeimage_1_link_8shapeimage_1_link_9